Hoontaek Lee, Kumjae Shin, Wonkyu Moon. Capacitive Measurements of SiO2 Films of Different Thicknesses Using a MOSFET-Based SPM Probe. Sensors, 21(11):4073, 2021. [doi]
@article{LeeSM21,
title = {Capacitive Measurements of SiO2 Films of Different Thicknesses Using a MOSFET-Based SPM Probe},
author = {Hoontaek Lee and Kumjae Shin and Wonkyu Moon},
year = {2021},
doi = {10.3390/s21124073},
url = {https://doi.org/10.3390/s21124073},
researchr = {https://researchr.org/publication/LeeSM21},
cites = {0},
citedby = {0},
journal = {Sensors},
volume = {21},
number = {11},
pages = {4073},
}