Integration of BEoL Compatible 1T1C FeFET Memory Into an Established CMOS Technology

David Lehninger, Hannes Mähne, Tarek Ali, Raik Hoffmann, Ricardo Olivo, Maximilian Lederer, Konstantin Mertens, Thomas Kämpfe, Kati Biedermann, Matthias Landwehr, Andreas Heinig, Defu Wang, Yukai Shen, Kerstin Bernert, Steffen Thiem, Konrad Seidel. Integration of BEoL Compatible 1T1C FeFET Memory Into an Established CMOS Technology. In IEEE International Memory Workshop, IMW 2022, Dresden, Germany, May 15-18, 2022. pages 1-4, IEEE, 2022. [doi]

@inproceedings{LehningerMAHOLM22,
  title = {Integration of BEoL Compatible 1T1C FeFET Memory Into an Established CMOS Technology},
  author = {David Lehninger and Hannes Mähne and Tarek Ali and Raik Hoffmann and Ricardo Olivo and Maximilian Lederer and Konstantin Mertens and Thomas Kämpfe and Kati Biedermann and Matthias Landwehr and Andreas Heinig and Defu Wang and Yukai Shen and Kerstin Bernert and Steffen Thiem and Konrad Seidel},
  year = {2022},
  doi = {10.1109/IMW52921.2022.9779252},
  url = {https://doi.org/10.1109/IMW52921.2022.9779252},
  researchr = {https://researchr.org/publication/LehningerMAHOLM22},
  cites = {0},
  citedby = {0},
  pages = {1-4},
  booktitle = {IEEE International Memory Workshop, IMW 2022, Dresden, Germany, May 15-18, 2022},
  publisher = {IEEE},
  isbn = {978-1-6654-9947-7},
}