The detection method of the silicon melting process in the CZ single-crystal furnace

Jiang Lei, Liu Ding, Zhao Yue, Jiao Shang-Bin. The detection method of the silicon melting process in the CZ single-crystal furnace. In 10th IEEE International Conference on Control and Automation, ICCA 2013, Hangzhou, China, June 12-14, 2013. pages 1358-1362, IEEE, 2013. [doi]

Abstract

Abstract is missing.