YinHua Lei, Yingcun Luo, Wei Wang, Zhihong Li. Molecular effusion-boltzmann model for parylene C deposition in deep trench. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 628-632, IEEE, 2010. [doi]
Abstract is missing.