M. Leicht, G. Fritzer, B. Basnar, S. Golka, J. Smoliner. A reliable course of Scanning Capacitance Microscopy analysis applied for 2D-Dopant Profilings of Power MOSFET Devices. Microelectronics Reliability, 41(9-10):1535-1537, 2001.
@article{LeichtFBGS01,
title = {A reliable course of Scanning Capacitance Microscopy analysis applied for 2D-Dopant Profilings of Power MOSFET Devices},
author = {M. Leicht and G. Fritzer and B. Basnar and S. Golka and J. Smoliner},
year = {2001},
tags = {analysis},
researchr = {https://researchr.org/publication/LeichtFBGS01},
cites = {0},
citedby = {0},
journal = {Microelectronics Reliability},
volume = {41},
number = {9-10},
pages = {1535-1537},
}