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A reliable course of Scanning Capacitance Microscopy analysis applied for 2D-Dopant Profilings of Power MOSFET Devices

M. Leicht, G. Fritzer, B. Basnar, S. Golka, J. Smoliner. A reliable course of Scanning Capacitance Microscopy analysis applied for 2D-Dopant Profilings of Power MOSFET Devices. Microelectronics Reliability, 41(9-10):1535-1537, 2001.

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