Mark Lemkin, Bernhard E. Boser. A three-axis micromachined accelerometer with a CMOS position-sense interface and digital offset-trim electronics. J. Solid-State Circuits, 34(4):456-468, 1999. [doi]
@article{LemkinB99,
title = {A three-axis micromachined accelerometer with a CMOS position-sense interface and digital offset-trim electronics},
author = {Mark Lemkin and Bernhard E. Boser},
year = {1999},
doi = {10.1109/4.753678},
url = {https://doi.org/10.1109/4.753678},
researchr = {https://researchr.org/publication/LemkinB99},
cites = {0},
citedby = {0},
journal = {J. Solid-State Circuits},
volume = {34},
number = {4},
pages = {456-468},
}