Characterization of Thick and Thin Film SiCN for Pressure Sensing at High Temperatures

Alfin Leo, Sergey Andronenko, Ion Stiharu, Rama B. Bhat. Characterization of Thick and Thin Film SiCN for Pressure Sensing at High Temperatures. Sensors, 10(2):1338-1354, 2010. [doi]

Abstract

Abstract is missing.