Advances of CMOS-MEMS technology for resonator applications

Sheng-Shian Li. Advances of CMOS-MEMS technology for resonator applications. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 520-523, IEEE, 2013. [doi]

Authors

Sheng-Shian Li

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