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Enhanced Odd-Harmonic Repetitive Control of Nanopositioning Stages Using Spectrum-Selection Filtering Scheme for High-Speed Raster Scanning

Linlin Li, Sumeet S. Aphale, Limin Zhu. Enhanced Odd-Harmonic Repetitive Control of Nanopositioning Stages Using Spectrum-Selection Filtering Scheme for High-Speed Raster Scanning. IEEE T. Automation Science and Engineering, 18(3):1087-1096, 2021. [doi]

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