Reliability assessment of a MEMS microphone under mixed flowing gas environment and shock impact loading

Jue Li, Mikael Broas, Jani Raami, Toni T. Mattila, Mervi Paulasto-Kröckel. Reliability assessment of a MEMS microphone under mixed flowing gas environment and shock impact loading. Microelectronics Reliability, 54(6-7):1228-1234, 2014. [doi]

Abstract

Abstract is missing.