Yadong Li, Chao Cheng, Yulan Lu, Jian Chen, Junbo Wang, Deyong Chen. A Resonant Differential Pressure Microsensor With a Stress Isolation Layer. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 1691-1694, IEEE, 2021. [doi]
@inproceedings{LiCLCWC21,
title = {A Resonant Differential Pressure Microsensor With a Stress Isolation Layer},
author = {Yadong Li and Chao Cheng and Yulan Lu and Jian Chen and Junbo Wang and Deyong Chen},
year = {2021},
doi = {10.1109/NEMS51815.2021.9451332},
url = {https://doi.org/10.1109/NEMS51815.2021.9451332},
researchr = {https://researchr.org/publication/LiCLCWC21},
cites = {0},
citedby = {0},
pages = {1691-1694},
booktitle = {16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021},
publisher = {IEEE},
isbn = {978-1-6654-1941-3},
}