Yadong Li, Chao Cheng, Yulan Lu, Jian Chen, Junbo Wang, Deyong Chen. A Resonant Differential Pressure Microsensor With a Stress Isolation Layer. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 1691-1694, IEEE, 2021. [doi]
Abstract is missing.