Gas Flow Rate Sensing by Curvature Change of Micro Quartz Resonators

Xiangzheng Li, Ye Chang, Xueyou Sun, Yue Feng, Weiwei Cui, Hao Zhang. Gas Flow Rate Sensing by Curvature Change of Micro Quartz Resonators. In 2023 IEEE SENSORS, Vienna, Austria, October 29 - Nov. 1, 2023. pages 1-4, IEEE, 2023. [doi]

Abstract

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