An Integrated Microfabricated Chip with Double Functions as an Ion Source and Air Pump Based on LIGA Technology

Hua Li, Linxiu Jiang, Chaoqun Guo, Jianmin Zhu, Yongrong Jiang, Zhencheng Chen. An Integrated Microfabricated Chip with Double Functions as an Ion Source and Air Pump Based on LIGA Technology. Sensors, 17(1):87, 2017. [doi]

@article{LiJGZJC17,
  title = {An Integrated Microfabricated Chip with Double Functions as an Ion Source and Air Pump Based on LIGA Technology},
  author = {Hua Li and Linxiu Jiang and Chaoqun Guo and Jianmin Zhu and Yongrong Jiang and Zhencheng Chen},
  year = {2017},
  doi = {10.3390/s17010087},
  url = {http://dx.doi.org/10.3390/s17010087},
  researchr = {https://researchr.org/publication/LiJGZJC17},
  cites = {0},
  citedby = {0},
  journal = {Sensors},
  volume = {17},
  number = {1},
  pages = {87},
}