An Integrated Microfabricated Chip with Double Functions as an Ion Source and Air Pump Based on LIGA Technology

Hua Li, Linxiu Jiang, Chaoqun Guo, Jianmin Zhu, Yongrong Jiang, Zhencheng Chen. An Integrated Microfabricated Chip with Double Functions as an Ion Source and Air Pump Based on LIGA Technology. Sensors, 17(1):87, 2017. [doi]

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