Jie Li, Zhuangde Jiang, Libo Zhao, Dejiang Lu, Zhikang Li, Yihe Zhao, Tingzhong Xu, Shuaishuai Guo, Jiuhong Wang, Yulong Zhao. A Through-Hole Capacitive Micromachined Ultrasonic Transdcuer with High Perfromance. In 14th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019, Bangkok, Thailand, April 11-14, 2019. pages 181-186, IEEE, 2019. [doi]
Abstract is missing.