Ming Li, Xiaoxu Kang, Xiaolan Zhong. Process Optimization for CMOS Compatible MEMS Capacitive Acoustic Sensor. In Fan Ye, Ting-Ao Tang, editors, 14th IEEE International Conference on ASIC, ASICON 2021, Kunming, China, October 26-29, 2021. pages 1-3, IEEE, 2021. [doi]
Abstract is missing.