A Vertically Stacked Nanosheet Gate-All-Around FET for Biosensing Application

Cong Li, Feichen Liu, Ru Han, Yiqi Zhuang. A Vertically Stacked Nanosheet Gate-All-Around FET for Biosensing Application. IEEE Access, 9:63602-63610, 2021. [doi]

Abstract

Abstract is missing.