Model Free iterative learning for table motion control of lithography machine - researchr publication authors

researchr

You are not signed in
Sign in
Sign up

Yuting Li, Ping Luo, Yunfeng Peng, Zhiyuan Liu. Model Free iterative learning for table motion control of lithography machine. In 8th International Conference on Information Systems Engineering, ICISE 2023, Dalian, China, June 23-25, 2023. pages 47-50, IEEE, 2023. [doi]

This author has not been identified. Look up 'Yuting Li' in GoogleThis author has not been identified. Look up 'Ping Luo' in GoogleThis author has not been identified. Look up 'Yunfeng Peng' in GoogleThis author has not been identified. Look up 'Zhiyuan Liu' in Google

runs on WebDSL