Yuting Li, Ping Luo, Yunfeng Peng, Zhiyuan Liu. Model Free iterative learning for table motion control of lithography machine. In 8th International Conference on Information Systems Engineering, ICISE 2023, Dalian, China, June 23-25, 2023. pages 47-50, IEEE, 2023. [doi]
@inproceedings{LiLPL23-0,
title = {Model Free iterative learning for table motion control of lithography machine},
author = {Yuting Li and Ping Luo and Yunfeng Peng and Zhiyuan Liu},
year = {2023},
doi = {10.1109/ICISE60366.2023.00017},
url = {https://doi.org/10.1109/ICISE60366.2023.00017},
researchr = {https://researchr.org/publication/LiLPL23-0},
cites = {0},
citedby = {0},
pages = {47-50},
booktitle = {8th International Conference on Information Systems Engineering, ICISE 2023, Dalian, China, June 23-25, 2023},
publisher = {IEEE},
isbn = {979-8-3503-0700-9},
}