Design and Fabrication of Piezoelectric Micromachined Ultrasound Transducer (pMUT) with Partially-Etched ZnO Film

Junhong Li, Wei Ren, Guoxiang Fan, Chenghao Wang. Design and Fabrication of Piezoelectric Micromachined Ultrasound Transducer (pMUT) with Partially-Etched ZnO Film. Sensors, 17(6):1381, 2017. [doi]

Authors

Junhong Li

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Wei Ren

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Guoxiang Fan

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Chenghao Wang

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