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MEMS Gas Sensor with On-chip Electrospun Ru-SnO2 Nanospheres Patterned by Photolithography

Jin Li, Xitong Sun, Tongheng Cheng, Fei Wang. MEMS Gas Sensor with On-chip Electrospun Ru-SnO2 Nanospheres Patterned by Photolithography. In 2024 IEEE SENSORS, Kobe, Japan, October 20-23, 2024. pages 1-4, IEEE, 2024. [doi]

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