MEMS Gas Sensor with On-chip Electrospun Ru-SnO2 Nanospheres Patterned by Photolithography

Jin Li, Xitong Sun, Tongheng Cheng, Fei Wang. MEMS Gas Sensor with On-chip Electrospun Ru-SnO2 Nanospheres Patterned by Photolithography. In 2024 IEEE SENSORS, Kobe, Japan, October 20-23, 2024. pages 1-4, IEEE, 2024. [doi]

Abstract

Abstract is missing.