Mechanism of O::2::-anneal induced V::fb:: shifts of Ru gated stacks

Z. Li, T. Schram, L. Pantisano, A. Stesmans, Thierry Conard, S. Shamuilia, V. V. Afanasiev, A. Akheyar, Sven Van Elshocht, D. P. Brunco, W. Deweerd, Y. Naoki, P. Lehnen, Stefan De Gendt, K. De Meyer. Mechanism of O::2::-anneal induced V::fb:: shifts of Ru gated stacks. Microelectronics Reliability, 47(4-5):518-520, 2007. [doi]

Abstract

Abstract is missing.