Hybrid Position/Force Fully Closed-Loop Control of a Flip-Chip Soft-Landing Bonding System

Jiedong Li, Hui Tang 0003, Zhongyuan Zhu, Sifeng He, Jian Gao 0002, Yunbo He, Xin Chen 0005. Hybrid Position/Force Fully Closed-Loop Control of a Flip-Chip Soft-Landing Bonding System. IEEE Transactions on Industrial Electronics, 69(9):9235-9245, 2022. [doi]

Authors

Jiedong Li

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Hui Tang 0003

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Zhongyuan Zhu

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Sifeng He

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Jian Gao 0002

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Yunbo He

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Xin Chen 0005

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