Fabry-Perot Interferometer Based on an Aluminum-Polyimide Composite Diaphragm Integrated With Mass for Acceleration Sensing

Shili Li, Xuqiang Wu, Jinhui Shi, Qiang Ge, Gang Zhang, Benli Yu. Fabry-Perot Interferometer Based on an Aluminum-Polyimide Composite Diaphragm Integrated With Mass for Acceleration Sensing. IEEE Access, 7:186510-186516, 2019. [doi]

@article{LiWSGZY19,
  title = {Fabry-Perot Interferometer Based on an Aluminum-Polyimide Composite Diaphragm Integrated With Mass for Acceleration Sensing},
  author = {Shili Li and Xuqiang Wu and Jinhui Shi and Qiang Ge and Gang Zhang and Benli Yu},
  year = {2019},
  doi = {10.1109/ACCESS.2019.2960797},
  url = {https://doi.org/10.1109/ACCESS.2019.2960797},
  researchr = {https://researchr.org/publication/LiWSGZY19},
  cites = {0},
  citedby = {0},
  journal = {IEEE Access},
  volume = {7},
  pages = {186510-186516},
}