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Fabry-Perot Interferometer Based on an Aluminum-Polyimide Composite Diaphragm Integrated With Mass for Acceleration Sensing

Shili Li, Xuqiang Wu, Jinhui Shi, Qiang Ge, Gang Zhang, Benli Yu. Fabry-Perot Interferometer Based on an Aluminum-Polyimide Composite Diaphragm Integrated With Mass for Acceleration Sensing. IEEE Access, 7:186510-186516, 2019. [doi]

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