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Novel Capacitive Sensing System Design of a Microelectromechanical Systems Accelerometer for Gravity Measurement Applications

Zhu Li, Wen-Jie Wu, Pan-Pan Zheng, Jin Quan Liu, Ji Fan, Liang Cheng Tu. Novel Capacitive Sensing System Design of a Microelectromechanical Systems Accelerometer for Gravity Measurement Applications. Micromachines, 7(9):167, 2016. [doi]

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