A Totally Decoupled Piezo-Driven XYZ Flexure Parallel Micropositioning Stage for Micro/Nanomanipulation

Yangmin Li, Qingsong Xu. A Totally Decoupled Piezo-Driven XYZ Flexure Parallel Micropositioning Stage for Micro/Nanomanipulation. IEEE T. Automation Science and Engineering, 8(2):265-279, 2011. [doi]

@article{LiX11-3,
  title = {A Totally Decoupled Piezo-Driven XYZ Flexure Parallel Micropositioning Stage for Micro/Nanomanipulation},
  author = {Yangmin Li and Qingsong Xu},
  year = {2011},
  doi = {10.1109/TASE.2010.2077675},
  url = {http://dx.doi.org/10.1109/TASE.2010.2077675},
  researchr = {https://researchr.org/publication/LiX11-3},
  cites = {0},
  citedby = {0},
  journal = {IEEE T. Automation Science and Engineering},
  volume = {8},
  number = {2},
  pages = {265-279},
}