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A Totally Decoupled Piezo-Driven XYZ Flexure Parallel Micropositioning Stage for Micro/Nanomanipulation

Yangmin Li, Qingsong Xu. A Totally Decoupled Piezo-Driven XYZ Flexure Parallel Micropositioning Stage for Micro/Nanomanipulation. IEEE T. Automation Science and Engineering, 8(2):265-279, 2011. [doi]

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