A Novel Piezoactuated XY Stage With Parallel, Decoupled, and Stacked Flexure Structure for Micro-/Nanopositioning

Yangmin Li, Qingsong Xu. A Novel Piezoactuated XY Stage With Parallel, Decoupled, and Stacked Flexure Structure for Micro-/Nanopositioning. IEEE Transactions on Industrial Electronics, 58(8):3601-3615, 2011. [doi]

Abstract

Abstract is missing.