Fabrication of Aberration-corrected Diffraction Grating for Soft X-ray Grating Monochromator

Yilei Li, Changqing Xie. Fabrication of Aberration-corrected Diffraction Grating for Soft X-ray Grating Monochromator. In Maria Raposo, Paulo A. Ribeiro, David Andrews, editors, Proceedings of the 7th International Conference on Photonics, Optics and Laser Technology, PHOTOPTICS 2019, Prague, Czech Republic, February 25-27, 2019. pages 110-113, SciTePress, 2019. [doi]

Abstract

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