State/Model-Free Variable-Gain Discrete Sliding Mode Control for an Ultraprecision Wafer Stage

Min Li, Kaiming Yang, Yu Zhu, Haihua Mu, Chuxiong Hu. State/Model-Free Variable-Gain Discrete Sliding Mode Control for an Ultraprecision Wafer Stage. IEEE Transactions on Industrial Electronics, 64(8):6695-6705, 2017. [doi]

Abstract

Abstract is missing.