Cun Li, Yulong Zhao, Rongjun Cheng. A micro resonant acceleration sensor comprising silicon support with temperature isolator and quartz doubled ended tuning fork. In 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2014, Waikiki Beach, HI, USA, April 13-16, 2014. pages 346-349, IEEE, 2014. [doi]
Abstract is missing.