Velocity Random Walk Modelling of a Silicon MEMS Resonant Accelerometer based on Non-AGC Control Loop

Dong Li, Qiancheng Zhao, Jian Cui. Velocity Random Walk Modelling of a Silicon MEMS Resonant Accelerometer based on Non-AGC Control Loop. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 1461-1464, IEEE, 2021. [doi]

Abstract

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