Zhikang Li, Libo Zhao, Zhuangde Jiang, Zhiying Ye, Yulong Zhao. Capacitive micromachined ultrasonic transducer for ultra-low pressure detection. In 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2014, Waikiki Beach, HI, USA, April 13-16, 2014. pages 600-603, IEEE, 2014. [doi]
Abstract is missing.