Ling Li, Chenxu Zhao, Mengwei Li, Zewen Liu. Symmetric toggle structured MEMS linear variable capacitor with large tunning ratio. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 1266-1269, IEEE, 2013. [doi]
Abstract is missing.