Design and Demonstration of an Electromagnetic Force-Rebalanced Sub-10-Hz Interferometric MEMS Accelerometer

Cheng Li, Xiang Zheng, Zhenyu Sun 0006, Luqiang Zhou, Xin Guo, Xin Huang, Bo Yang 0019. Design and Demonstration of an Electromagnetic Force-Rebalanced Sub-10-Hz Interferometric MEMS Accelerometer. IEEE T. Instrumentation and Measurement, 72:1-10, 2023. [doi]

Abstract

Abstract is missing.