Wei Li, Xiaofeng Zhou, Jian Wu, Youling Lin, Ze Wang, Lu feng Che. A MEMS accelerometer with double-sided symmetrical folded-beams on single wafer. In 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, Los Angeles, CA, USA, April 9-12, 2017. pages 194-197, IEEE, 2017. [doi]
Abstract is missing.