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A Data-Driven Variable-Gain Control Strategy for an Ultra-Precision Wafer Stage With Accelerated Iterative Parameter Tuning

Min Li, Yu Zhu, Kaiming Yang, Chuxiong Hu. A Data-Driven Variable-Gain Control Strategy for an Ultra-Precision Wafer Stage With Accelerated Iterative Parameter Tuning. IEEE Trans. Industrial Informatics, 11(5):1179-1189, 2015. [doi]

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