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An Integrated Model-Data-Based Zero-Phase Error Tracking Feedforward Control Strategy With Application to an Ultraprecision Wafer Stage

Min Li, Yu Zhu, Kaiming Yang, Chuxiong Hu, Haihua Mu. An Integrated Model-Data-Based Zero-Phase Error Tracking Feedforward Control Strategy With Application to an Ultraprecision Wafer Stage. IEEE Transactions on Industrial Electronics, 64(5):4139-4149, 2017. [doi]

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