CMOS-compatible silicon double-etched apodized waveguide grating couplers for high efficient coupling

Chao Li, Huijuan Zhang, Mingbin Yu, Guo-Qiang Lo. CMOS-compatible silicon double-etched apodized waveguide grating couplers for high efficient coupling. In 2013 Optical Fiber Communication Conference and Exposition and the National Fiber Optic Engineers Conference (OFC/NFOEC), Anaheim, CA, USA, March 17-21, 2013. pages 1-3, IEEE, 2013. [doi]

@inproceedings{LiZYL13,
  title = {CMOS-compatible silicon double-etched apodized waveguide grating couplers for high efficient coupling},
  author = {Chao Li and Huijuan Zhang and Mingbin Yu and Guo-Qiang Lo},
  year = {2013},
  url = {http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arnumber=6533154},
  researchr = {https://researchr.org/publication/LiZYL13},
  cites = {0},
  citedby = {0},
  pages = {1-3},
  booktitle = {2013 Optical Fiber Communication Conference and Exposition and the National Fiber Optic Engineers Conference (OFC/NFOEC), Anaheim, CA, USA, March 17-21, 2013},
  publisher = {IEEE},
  isbn = {978-1-4799-0457-0},
}