Online Precise Motion Measurement of 3-DOF Nanopositioners Based on Image Correlation

Hai Li, Xianmin Zhang, Benliang Zhu, Sergej Fatikow. Online Precise Motion Measurement of 3-DOF Nanopositioners Based on Image Correlation. IEEE T. Instrumentation and Measurement, 68(3):782-790, 2019. [doi]

@article{LiZZF19-0,
  title = {Online Precise Motion Measurement of 3-DOF Nanopositioners Based on Image Correlation},
  author = {Hai Li and Xianmin Zhang and Benliang Zhu and Sergej Fatikow},
  year = {2019},
  doi = {10.1109/TIM.2018.2853378},
  url = {https://doi.org/10.1109/TIM.2018.2853378},
  researchr = {https://researchr.org/publication/LiZZF19-0},
  cites = {0},
  citedby = {0},
  journal = {IEEE T. Instrumentation and Measurement},
  volume = {68},
  number = {3},
  pages = {782-790},
}