Online Precise Motion Measurement of 3-DOF Nanopositioners Based on Image Correlation

Hai Li, Xianmin Zhang, Benliang Zhu, Sergej Fatikow. Online Precise Motion Measurement of 3-DOF Nanopositioners Based on Image Correlation. IEEE T. Instrumentation and Measurement, 68(3):782-790, 2019. [doi]

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