A Deep Reinforcement Learning Approach to Optimize Closing Down a Single-Arm Cluster Tool

Weixin Liang, Qinghua Zhu 0001, Zongru Li, Jiantie Zhou, Yan Hou. A Deep Reinforcement Learning Approach to Optimize Closing Down a Single-Arm Cluster Tool. In IEEE International Conference on Systems, Man, and Cybernetics, SMC 2024, Kuching, Malaysia, October 6-10, 2024. pages 4277-4282, IEEE, 2024. [doi]

Abstract

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