Jinxing Liang, Sujin Cui, Liyuan Zhang, Ancheng Shao. Realization of quartz MEMS accelerometer based on flip chip process. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 1194-1197, IEEE, 2013. [doi]
@inproceedings{LiangCZS13-0,
title = {Realization of quartz MEMS accelerometer based on flip chip process},
author = {Jinxing Liang and Sujin Cui and Liyuan Zhang and Ancheng Shao},
year = {2013},
doi = {10.1109/NEMS.2013.6559933},
url = {http://dx.doi.org/10.1109/NEMS.2013.6559933},
researchr = {https://researchr.org/publication/LiangCZS13-0},
cites = {0},
citedby = {0},
pages = {1194-1197},
booktitle = {8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013},
publisher = {IEEE},
}