Jinxing Liang, Sujin Cui, Liyuan Zhang, Ancheng Shao. Realization of quartz MEMS accelerometer based on flip chip process. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 1194-1197, IEEE, 2013. [doi]
Abstract is missing.