Zhongzhu Liang, Jianguo Fu, Cong Feng, Jingqiu Liang. Design and demonstration of micro multi-step mirrors and light source in micro FTIR. In 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011. pages 433-436, IEEE, 2011. [doi]
Abstract is missing.