Actuator Saturation Compensator Design for Disturbance Observer Based Control Structure Supporting Piezo Driven Nanopositioning Systems

Heng Liang, Kai Liu, Man Li, Peng Du. Actuator Saturation Compensator Design for Disturbance Observer Based Control Structure Supporting Piezo Driven Nanopositioning Systems. In 5th IEEE International Conference on Information Systems and Computer Aided Education, ICISCAE 2022, Dalian, China, September 23-25, 2022. pages 645-650, IEEE, 2022. [doi]

Abstract

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